Literature
Here is a list of Brontek’s scientific papers and reports:
Boron cathodic arc as an ion source for shallow junction ion implantation of boron. J. M. Williams, C.C. Klepper, D. J. Chivers, R. C. Hazelton, J. J. Moschella, J. Vac. Sci. Technol B, 26 ( 2008) 368.
Operation and Applications of the Boron Cathodic Arc Ion Source. J. M. Williams, C. C. Klepper, D. J. Chivers, R. C. Hazelton, J. H. Freeman, Ion Implantation Technology, 2008. AIP Conference Proceedings 1066, American Institute of Physics, Melville (2008) p 469.
Boron Ion Implantation into Silicon by Use of the Boron
Ion implantation of boron into silicon by use of the boron cathodic-arc plasma generator: First results. J.M. Williams, C.C. Klepper, R.C. Hazelton. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials & Atoms, vol.237, no.1-2, Aug. 2005, pp.278-83.
FePt nanoparticles formed in Al2O3 by ion beam synthesis: Annealing environment effects. White, C. W.; Withrow, S. P.; Williams, J. M.; Budai, J. D.; Meldrum, A.; Sorge, K. D.; Thompson, J. R.; Boatner, L. A. Journal of Applied Physics, Volume 95, Issue 12 (2004) pp. 8160-8166.
Key Patent:
Boron Ion Delivery System, James M. Williams, US 7,238,597,B2
Date of patent: Jul 3, 2007
Filed Sept. 19, 2003
[…] The patented PlasmaArc Implanter is based on vacuum (cathodic) arc technology. Technical references can be found here. […]
Pingback by brontek.com » Brontek’s PlasmaArc Implanter as a Critical Technology — October 20, 2007 @ 11:47 pm